Abstract:This work introduces a patterned laser‐induced microjet‐assisted ablation method to achieve precise ablation on difficult‐to‐machine materials. And a reliable geometrical model is established to predict the ablation process. Therefore, microgrooves with controllable cross‐sections can be fabricated by shaping the laser spot into customized patterns. This method provides a highly flexible solution for producing diverse microstructures on difficult‐to‐machine materials. Fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials is significantly valuable but still challenging. Herein, a patterned laser‐induced microjet‐assisted ablation method for cross‐sectional profiles controllable laser micromachining is proposed. During the liquid‐assisted laser ablation process, debris and bubbles that may disturb the laser energy deposition can be instantaneously expelled by a directional laser‐induced microjet. The Gaussian laser spot is spatially modulated into specific geometric shapes, such as triangles, to tune locally deposited laser energy to carve microgrooves with designed cross‐sections. To achieve customized microgrooves efficiently, a reliable geometrical model based on the ablation threshold theory is developed to guide the processing parameter selection, including the laser spot shape, polarization, pulse energy, and scanning strategies. The simulation and experimental results confirm that this method achieves the decoupled control of the groove depth and width in a single‐path laser ablation process. Using this method, the design and manufacturing of microgrooves with controllable cross‐sections on single crystalline silicon carbide are demonstrated. The patterned laser‐induced microjet‐assisted ablation method provides a new route for fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials.

Laser Etching of Groove Structures with Micro-Optical Fiber-Enhanced Irradiation

Fabrication of Micro Grooves on Silicon by Micro Optical Fiber Enhanced Pulse Laser Irradiation

Laser Wavelength Effects On(ti,al,si)n in Near-Field Laser Nanostructuring by Micron Optical Fiber Enhanced Irradiation

Laser Direct Writing Using Submicron-Diameter Fibers.

Laser Induced Twin-Groove Surface Texturing Based on Optical Fiber Modulation

A method of micro laser surface texturing based on optical fiber focusing

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Generation mechanisms of laser-induced periodic nanostructures on surfaces of microgrooves

Fabrication of Nanostructures by Laser Optical Focusing

Processing Microstructure on Film by Femtosecond Laser

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

TiO2 micro-devices fabricated by laser direct writing.

Fabrication of microstructures by picosecond laser

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Experimental Research and Optimization of Ti-6Al-4V Alloy Microgroove Machining Based on Waterjet-Guided High-Power Laser

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography