TiO2 micro-devices fabricated by laser direct writing.

Yongsheng Wang,Junjie Miao,Ye Tian,Chuanfei Guo,Jianming Zhang,Tianling Ren,Qian Liu
DOI: https://doi.org/10.1364/OE.19.017390
IF: 3.8
2011-01-01
Optics Express
Abstract:Constructing micro/nanostructures based on TiO2 has attracted increasing attention due to the excellent properties of TiO2. In this study, we report a simple method to directly fabricate TiO2 micro-devices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO2 structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment. (C) 2011 Optical Society of America
What problem does this paper attempt to address?