Model and Open-Loop Characteristics Test of the Silicon Resonant Pressure Microsensor

WANG Ying-ying,FAN Shang-chun,XING Wei-wei,CAI Chen-guang
DOI: https://doi.org/10.3969/j.issn.1004-1699.2007.02.009
2007-01-01
Abstract:Based on the analysis of the magnitude and phase freq ue ncy characteristics of the resonant silicon microstructure pressure sensor,expe riment investigation on the open-loop test of resonant sensors,curve fitting a nd data processing with Matlab,a model of the resonant silicon microsensor was described.The resonant frequency,quality factor and phase characteristic of th e sensor can then be calculated without the influence of the unknown phase delay.The obtained results here are of significance to develop the closed-loop syst em of microsensor.
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