A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Yan Li,Hao Li,Yifeng Xiao,Le Cao,Zhan-She Guo

DOI: https://doi.org/10.3390/s21072545

IF: 3.9

2021-04-05

Sensors

Abstract:A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonlinearity because of the nonlinear vibration of the resonant beam. A verification circuit is devised to imitate the nonlinear behavior of the model by matching the simulation measurement error of the frequency offset produced by the circuit block with the theoretical counterparts obtained from the model. Secondly, the principle of measurement error compensation is studied, and the compensation method dealing with nonlinear characteristics of the resonant beam is proposed by introducing a compensation beam and corresponding differential operations. The measurement error, compensation rate, and measurement residual between the two scenarios that use single beam and double beams, respectively, are derived and are compared with their simulation and experimental counterparts. The results coincide with the predicted trend, which verifies the effectiveness of the compensation method.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

What problem does this paper attempt to address?

This paper aims to solve the measurement error problem of silicon micro - resonant sensors under nonlinear vibration. Specifically, the researchers proposed a compensation method to reduce the measurement error caused by nonlinear vibration, thereby improving the accuracy and detection range of the sensor. The following are the main problems and solutions mentioned in the paper:

### Research Background
Silicon micro - resonant sensors are widely used in civilian and military fields due to their characteristics such as miniaturization, light weight, low energy consumption, high accuracy and good stability. Especially in the aerospace field, the accuracy requirements for sensors are higher. However, due to the influence of nonlinear vibration, the accuracy and detection range of existing sensors are still insufficient. Nonlinear vibration will cause the natural frequency of the resonant beam to change with the change of vibration amplitude, resulting in measurement error.

### Main Problems
1. **Measurement Error Caused by Nonlinear Vibration**: When the resonant beam undergoes nonlinear vibration, its natural frequency will change with the change of vibration amplitude, resulting in measurement error.
2. **How to Effectively Compensate for the Measurement Error Caused by Nonlinear Vibration**: Researchers need to find a method to compensate for this nonlinear vibration to improve the measurement accuracy and detection range of the sensor.

### Solutions
1. **Establish a Parameter Characterization Model**: First, the researchers established a parameter characterization model of the silicon micro - resonant sensor, which can describe the nonlinear vibration characteristics of the resonant beam.
2. **Design a Verification Circuit**: In order to verify the accuracy of the model, the researchers designed a verification circuit and verified the effectiveness of the model by comparing the simulated measurement error with the theoretical value.
3. **Propose a Compensation Method**: The researchers proposed a method of introducing a compensation beam and the corresponding differential operation to compensate for the measurement error caused by nonlinear vibration. Specifically, one working beam in the double - beam structure is used to detect pressure changes, and the other compensation beam is used to isolate the influence of nonlinear vibration. By calculating the frequency difference between the two beams, the measurement error can be significantly reduced.
4. **Experimental Verification**: Through a series of experiments, the researchers verified the effectiveness of the proposed compensation method, and the experimental results are consistent with the predicted trend.

### Key Formulas
- **Resonant Frequency of Nonlinear Vibration**:
\[
\hat{\omega}_r=\hat{\omega}_1 + \frac{3\hat{a}}{8r^2}\hat{\omega}_1\epsilon
\]
where \(\hat{\omega}_1\) is the natural frequency of the resonant beam, \(\hat{a}\) is the vibration amplitude, \(r\) is the radius of gyration of the cross - section, and \(\epsilon\) is a small perturbation parameter.

- **Resonant Frequency Difference of Double - Beam Structure**:
\[
\Delta\hat{\omega}_{ra}-\Delta\hat{\omega}_{rb}=(\Delta\hat{\omega}_a - \Delta\hat{\omega}_b)+(\Delta\hat{\omega}_{pa}-\Delta\hat{\omega}_{pb})+(\Delta\hat{\omega}_{ta}-\Delta\hat{\omega}_{tb})
\]
where \(\Delta\hat{\omega}_{ra}\) and \(\Delta\hat{\omega}_{rb}\) are the resonant frequency changes of the working beam and the compensation beam respectively, \(\Delta\hat{\omega}_{pa}\) and \(\Delta\hat{\omega}_{pb}\) are the natural frequency changes caused by the measured pressure, and \(\Delta\hat{\omega}_{ta}\) and \(\Delta\hat{\omega}_{tb}\) are the natural frequency changes caused by electro - thermal excitation.

### Conclusion
This paper successfully solves the measurement error problem of silicon micro - resonant sensors under nonlinear vibration by establishing a parameter characterization model, designing a verification circuit and proposing a compensation method, and improves the accuracy and detection range of the sensor. The experimental results verify the effectiveness of the proposed method.