BCB/InP Based Wideband and Low Loss Coplanar Waveguide Microwave Transmission Line

侯海燕,熊兵,徐建明,周奇伟,孙长征,罗毅
DOI: https://doi.org/10.16818/j.issn1001-5868.2008.05.030
2008-01-01
Abstract:A wideband(0~40 GHz),low loss coplanar waveguide microwave transmission line based on BCB polymer/InP substrate was designed and fabricated for high speed traveling-wave electro-absorption(EA) modulators.Based on the simulation of the structure of coplanar waveguides,the key structure factors including the thickness of BCB films,the conductivity of InP substrate,and the signal electrode width were optimized.The simulation results show that the optimum microwave transmission can be obtained at BCB film thickness of 4 μm,InP conductivity less than 0.002(Ω·cm)-1 and signal electrode width of 84 μm.Therefore,by using a semi-insulated InP substrate with resistivity of 108 Ω·cm and a 4 μm thick spin-coated BCB thin film,a coplanar waveguide transmission line was fabricated with microwave loss less than 0.5 dB/mm in 0~40 GHz range.
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