Microwave characteristics analysis of coplanar electrodes in III-V semiconductors traveling-wave modulators

Jianyi Yang,Qiang Zhou,Zhiwu Wu,Tongxi Wu,Minghua Wang
1997-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:The microwave characteristics of the coplanar electrodes of traveling wave modulators in III-V compound semiconductors with the S.I. substrate and an n+ heavy doped epitaxial layer are analyzed by means of the Method of Line. The different functions of the odd and even symmetric modes in coplanar microstrips are pointed, and then the influences on the microwave characteristics of the structural parameters of the modulator are analyzed in detail. Based on the analytical results of the microwave characteristics, a structure of a traveling-wave optical waveguide modulator is designed, whose 3dB bandwidth is estimated above 40GHz. Finally, the microwave characteristics are discussed, and the possibility of applying the quasi-statics method to analyze the microwave characteristics in this case is pointed.
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