A Third-order Trajectory Planning Algorithm for Ultra-precision Point-to-point Motion

Mu Haihua,Zhou Yunfei,Yan Sijie,Yang Hua
DOI: https://doi.org/10.3321/j.issn:1003-8728.2008.02.022
2008-01-01
Abstract:We study a third-order trajectory planning algorithm for ultra-precision point-to-point motion and its accuracy compensation method.First we explain the characteristics that have to be available for the applicability of the trajectory planning algorithm and the requirements for implementing the optimization of the trajectory time.Considering the whole process of the motion trajectory,we propose the third-order trajectory planning algorithm with time optimization through preprocessing.We also put forward the time roundness method for appropriately reducing the system dynamics constraints,which effectively compensates for the accuracy losses caused by time discretization implementation for the trajectory planning algorithm.A calculation instance verifies the effectiveness and reliability of the algorithm,which is successfully applied to the research and development of nano-level accuracy semiconductor manufacturing equipment.
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