Third-order Profile Planning for Motion Holding Constant Velocity and Realization of Motion Overlapping

Teng Wei,Zhou Yunfei,Mu Haihua
2009-01-01
Abstract:Two motion modes are put forward for high precision and effectiveness in semiconductor manufacturing industry,one is work motion holding constant velocity process,the other is preparing motion serving for process before work motion.A third order profile planning algorithm is studied for work motion,which can guarantee the controlled object moving to an appointed position with an appointed velocity accurately.Then,through recalculating the switch times,the overlapping between preparing motion and work motion can be realized which include four conditions: work motion overlapping preparing motion in the same direction,work motion overlapping preparing motion in the opposite direction,preparing motion overlapping work motion in the same direction,and preparing motion overlapping work motion in the opposite direction.Finally,experimental results demonstrate that our method has extremely high precision and can highly promote the productivity using overlapping.Our method has been successfully applied in semiconductor equipments manufacturing.
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