Research on Fourth-order Profile Planning Algorithm for High Accuracy Point-to-point Motion System

Mu Haihua,Zhou Yunfei,Yan Sijie,Han Aiguo
DOI: https://doi.org/10.3321/j.issn:1004-132x.2007.19.018
2007-01-01
Abstract:A novel algorithm of four-order profile planning for point-to-point motion and error compensation method were investigated. The characteristics for the applicability of profile planning algorithm and the requirements for time-optimality of the profile were firstly analyzed. Under the consideration of the profile as a whole, the preprocessing and algorithm with time-optimality for four-order profile planning were presented, based on the system dynamics constraints. Also, an approach of switching time roundness was proposed by reducing system dynamics constraints. This approach compensates effectively accuracy losses in the discrete time implementation. Experimental results show the effectiveness and reliability of proposed methods. Practically, these methods have been successfully applied in semiconductor manufacturing equipment.
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