Third-order trajectory planning for high accuracy point-to-point motion

Haihua Mu,Yunfei Zhou,Sijie Yan,Aiguo Han
DOI: https://doi.org/10.1007/s11460-009-0017-y
2008-01-01
Frontiers of Electrical and Electronic Engineering in China
Abstract:This article studies a third-order trajectory planning method for point-to-point motion. All available instances for third-order trajectory planning are first analyzed. To distinguish those, three criteria are presented relying on trajectory characteristics. Following that, a fast preprocessing approach considering the trajectory as a whole is given based on the criteria constructed and system constraints. Also, the time-optimality of the trajectory is obtained. The relevant formulas are derived with the combination of geometrical symmetry of trajectory and area method. As a result, an accurate algorithm and its implementation procedure are proposed. The experimental results show the effectiveness and precision of the proposed method. The presented algorithm has been applied in semiconductor manufacturing equipment successfully.
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