Third-order profile planning algorithm and implementation for high accuracy point-to-point motion

Haihua Mu,Yunfei Zhou,Sijie Yan,Aiguo Han
DOI: https://doi.org/10.3321/j.issn:1671-4512.2007.12.017
2007-01-01
Abstract:All available instances for third-order profile planning firstly were analyzed. To identify that, three criteria were presented relying on profile characteristics. Hereafter a fast preprocessing approach considering the profile as a whole was given based on three criteria above and system constraints. And also time-optimality of the profile was obtained. The relevant formulas were easily derived with combination geometrical symmetry of profile and area method. As a result, accurate algorithm and its implementation procedure were proposed. Experimental results show the effectiveness and precision of the proposed methods. Practically, the proposed methods have been in successful use for semiconductor manufacturing equipments.
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