Trajectory Planning for Ultra-precision Stages

JIA Song-tao,ZHU Yu,LI Heng,NIE Hong-wei
DOI: https://doi.org/10.3969/j.issn.1001-2265.2007.10.004
2007-01-01
Abstract:In this paper,several techniques of S-curve input design were discussed and compared.It is clearly that minimum-jerk has aggressive advantage compared with others,considering the motion characters of the ultrla-precision stage.Then,a new technique of S-curve design based on minimum-jerk was proposed.Experiments were carried out on a 1DOF air bearing ultra-precision stage,the results show that the proposed technique can improve the disturbance resistance ability,enhance the tracking accuracy of the system,and what is more,the positioning efficiency is greatly improved.
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