The influence of fluoride ion on the current efficiency of pulse plating of copper

G.S. Tzeng,C.C. Wan
DOI: https://doi.org/10.1016/S0022-1139(00)80296-1
IF: 2.226
1991-01-01
Journal of Fluorine Chemistry
Abstract:This investigation is concerned with the effect of fluoride ion additives on the current efficiency of copper deposition under conditions of pulsed current. The parameters include the pulsating current density and the off - time duration. Fluoride - containing electrolytes were found to have higher current efficiency than the acidic copper sulfate electrolyte. A model based on a successive charge transfer process was proposed to explain the experimental observations. Fluoride ions can complex with cuprous ions to prevent its disproportionation, which results in a higher current efficiency.
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