Ultra-precision micro-displacement worktable with vibration suppression function

Wei Yan-ding
2010-01-01
Abstract:Aiming at the increasing number of ultra-precision instruments, the worktable with work environment is commonly provided, this can only reduce vibrating interference from outside, but it is impossible to eliminate the interference caused by the action of various actuators with the instruments themselves. The micro-displacement worktable in this paper not only has a good positional function, but also can effectively suppress vibrating interference occurred in the equipment itself by applying the anti-position principle and adopting and closed-loop PID control algorithm, much more comprehensively obtaining the good work environment required by the precision equipment, making them to be ultra-precision in the real meaning.
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