The Investigation and Experimentation on Vibration Isolation System of Ultra-high Precision Stage

HUANG Huan,YU Dingwen,LIU Xiangyang
DOI: https://doi.org/10.3969/j.issn.1671-1815.2006.01.006
2006-01-01
Abstract:A vibration isolation system of ultra-high precision stage is set up for micro-electron discharge machining(micro-EDM), including two isolation equipments. The first isolation is an active Vibration Isolation platform and the second is a "Ji Nan Black" Granite table. The modal of the platform and the table is investigated and the vibration identity of the system is known by experimentation of modal analysis and simulation based on FEM(Finite Element Method). The results show that the system enhances the effect of vibration isolation.
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