State Space Lqg-Based Active Microvibration Control Of Micro-Manufacturing Platform

Chunliang Zhang,Deqing Mei,Zichen Chen
2002-01-01
Abstract:This system uses air springs and rubber layer as passive vibration isolation elements and giant magnetostrictive actuators as active vibration isolation elements. Actuators and air springs are arranged in parallel. The air springs and the rubber layer of the passive system are synthesized so as to minimize the root-mean-square values of amplitude of the micro-manufacturing platform and the discrete time LQG controller based on a state space model is employed for controlling actuators. Simulation studies show that the developed active vibration control system has good isolation performance against the floor disturbance over wide frequency area. For random or white noise excitation, the amplitude of micro-manufacturing platform is reduced to approximately 15% by the active control system.
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