3-V Driven Pop-Up Micromirror for Reflecting Light Toward Out-Of-Plane Direction for Voa Applications

C Lee,YS Lin,YJ Lai,MH Tasi,CC Chen,CY Wu

DOI: https://doi.org/10.1109/lpt.2004.824964

IF: 2.6

2004-01-01

IEEE Photonics Technology Letters

Abstract:Novel axial aligned fiber-to-fiber variable optical attenuator (VOA) that used a pop-up micromirror to reflect the attenuated light toward out-of-plane was designed and characterized. Unlike axial-type VOA devices that suffer from large return loss and large operation voltage, U-shaped electrothermal actuator array only requires 3-V dc bias to achieve 37-dB attenuation in our new design. Insertion loss, return loss, and wavelength-dependent loss at attenuation of 3 dB were measured to be 0.3, -45, and 0.28 dB, respectively.