Abstract:TDFA-band (2-mu m waveband) has been considered as a promising optical window for the next generation of optical communication and computing. Absorption modulation, one of the fundamental reconfigurable manipulations, is essential for large scale photonic integrated circuits. However, few efforts have been involved in exploring absorption modulation at TDFA-band. In this work, variable optical attenuators (VOAs) for TDFA-band wavelengths were designed and fabricated based on a silicon-on-insulator (SOI) platform. By embedding a short PIN junction length of 200 mu m into the waveguide, the fabricated VOA exhibits a high modulation depth of 40.49 dB at 2.2V and has a fast response time (10 ns) induced by the plasma dispersion effect. Combining the Fabry-Perot cavity effect and plasma dispersion effect of silicon, the attenuator could achieve a maximum attenuation of more than 50 dB. These results promote the 2-mu m waveband silicon photonic integration and are expected to the future use of photonic attenuators in crosstalk suppression, optical modulation, and optical channel equalization.

Development of MEMS VOA with only one shutter for dual signals simultaneous operation

Research Development of Variable Optical Attenuator

Fast response MEMS VOA with grid-type shutter

Polymer-Based Variable Optical Attenuator

Design and Fabrication of A Novel Micromechanical Variable Optical Attenuator

Compact variable optical attenuator based on multimode interference coupler

A Novel Variable Optical Attenuator Based on Micro-Electromechanical System (MEMS)

Digitally Controlled Programmable High‐speed Variable Optical Attenuator

Monolithically Integrated MEMS Optical Device with Switching and Attenuating Function

A Study of Electronic Interface for Mems Variable Optical Attenuator (Voa)

Novel Multifunctional Device for Optical Power Splitting, Switching, and Attenuating

A Micro-Machining-based Digital Variable Optical Attenuator

All-optical High Performance Microwave Oscillator with Enhanced Modulation Efficiency Based on SOAs

TDFA-BAND SILICON OPTICAL VARIABLE ATTENUATOR

Micromechanical Variable Optical Attenuator Based on EDM Micromachining

A Micromachining Based Miniature Variable Optical Attenuator

Micromachining-based fiber-coupled variable optical attenuator

High-speed electrooptical VOA integrated in silicon-on-insulator

Compact Variable Optical Attenuator Based on the W Type Waveguide

Dual-Frequency Addressed Variable Optical Attenuator with Submillisecond Response Time

Low-Power-Consumption and Broadband 16-Channel Variable Optical Attenuator Array Based on Polymer/Silica Hybrid Waveguide