Aerosol-Assisted Mocvd Growth of Gd2o3-Doped Ceo2 Thin Sofc Electrolyte Film on Anode Substrate

HZ Song,HB Wang,SW Zha,DK Peng,GY Meng
DOI: https://doi.org/10.1016/s0167-2738(02)00688-4
IF: 3.699
2003-01-01
Solid State Ionics
Abstract:Aerosol-assisted metal-organic chemical vapor deposition (AA-MOCVD) with β-diketonate precursors was employed in depositing thin films of solid oxide fuel cells (SOFCs) electrolyte material, gadolinia-doped ceria (GDC), on anode (NiO+YSZ) substrates. The films have been successfully synthesized in a wide temperature range (300–600 °C) and characterized by X-ray powder diffraction, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sheet resistance measurements were carried out between 350 and 850 °C to study the effects of adsorbed oxygen on film ionic conductivity.
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