Abstract:The magnetic field configuration of magnetron sputtering has an important influence on films' properties. Here, two kinds of magnetic field configurations, Sm2Co17(outer)/Sm2Co17(inner) and Sm2Co17(outer)/Ferrite (inner), were used to deposit amorphous carbon (a-C) films. Tribo-meter, Nano-indentation, Raman spectroscopy, XPS, high resolution transmission electron microscopy as well as OPERA-2D for magnetic field simulation were employed to study the influence of the magnetic field configuration on the mechanical and tribological properties of a-C films. Our results show that higher coefficients of geometrical unbalance induced a higher deposition rate and a higher hardness of a-C films. However, the friction coefficient shows an inverse trend, and the wear life is short, which can be ascribed to saturation effects via adsorption of H, O, and OH and corrosion wear, which would accelerate the wear rate. Our work will booster interesting to study the magnetic field configurations influence on a-C films properties via magnetron sputtering.

Enhanced room-temperature positive magnetoresistance of a-C:Fe film

Magnetoresistance and Current-Controlled Electric Transport Properties of Fe-C Film on Si Substrate

Soft Magnetism and Microwave Magnetic Properties of Fe-Co-Hf Films Deposited by Composition Gradient Sputtering

Tunable Positive Magnetoresistance Effect of Co-Doped Amorphous Carbon Films

Negative Magnetoresistance In Undoped Semiconducting Amorphous Carbon Films

Bias Voltage Controlled Positive Magnetoresistance of Fe 0.05 −C 0.95 /si Heterostructures

Giant Magnetoresistance of Fe_x-C_(1-x) Films on Si Substrates

Positive And Negative Magnetoresistance Of A-C:Fe/Si Heterojunctions

Magnetotransport Properties of Undoped Amorphous Carbon Films

Structure and Magneto-Electrical Properties of Fe-C Films Prepared by Magnetron Sputtering

Magnetoresistance sign change in iron-doped amorphous carbon films at low temperatures

Study of Giant Magnetoresistance and Giant Electroresistance of Carbon Based Thin Film

Room-temperature Magnetoresistance in A-C:Co/si System

Comparative Study of the Tribology of Amorphous Carbon Films Via Magnetron Sputtering Depending on the Different Magnetic Field

Intrinsic Mechanism for Anisotropic Magnetoresistance and Experimental Confirmation in Co_{x}Fe_{1-x} Single-Crystal Films

Structure Dependent Negative Magnetoresistance of Amorphous Carbon Thin Films

Positive linear magnetoresistance in Fex-C1-x composites

Current-controlled Channel Switching and Magnetoresistance in an Fe3C Island Film Supported on a Si Substrate

Channel Switching Effect and Magnetoresistance in Iron Doped Amorphous Carbon Films on Silicon Substrates

Large Magnetoresistance of Amorphous Carbon Films

Intrinsic mechanism for anisotropic magnetoresistance and experimental confirmation in Co$_x$Fe$_{1-x}$ single-crystal films