The Structure and Optical Properties of Silicon Nanowires Prepared by Inductively Coupled Plasma Chemical Vapor Deposition

Yanli Qin,Fei Li,Dequan Liu,Hengqing Yan,Jinxiao Wang,Deyan He
DOI: https://doi.org/10.1016/j.matlet.2011.01.033
IF: 3
2011-01-01
Materials Letters
Abstract:Silicon nanowires were prepared by vapor–liquid–solid (VLS) mechanism at a growth temperature as low as 380°C in an inductively coupled plasma chemical vapor deposition system. The nanowires consist of crystalline core surrounded by a thick amorphous silicon shell. An increase in plasma power produces dense and long nanowires with thick amorphous shell, accompanied with a thick uncatalyzed amorphous silicon film on the silicon substrate. Small catalyst nanoparticles are easier activated by plasma to grow the dense and thin nanowires in comparison with the large-size nanoparticles. Moreover, an enhanced optical absorption is achieved due to the strong light trapping and anti-reflection effects in the thin and tapered silicon nanowires with high density.
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