Progress of Surface Roughness Measurement Based on Optical Method

LIU Chen,LU Rongsheng,CHEN Lei,WANG Junwu
DOI: https://doi.org/10.16818/j.issn1001-5868.2010.04.002
2010-01-01
Abstract:Surface roughness is a basic parameter in describing the micro-profile of surface in machining.As the accuracy demand for surface roughness in modern industry is higher and higher,a number of new measurement methods,especially optical method were put forward.In this article,introduced are four commonly used optical methods in surface roughness measurement:focus method,interferometry method,scattering method and the speckle method,and their respective advantages,defects and study progresses are reviewed.On this base,a new kind of optical measurement method named computer texture analysis method is put forward.
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