CdTe Nanocrystalline Thin Films Grown on Different Substrates by Low Temperature Sputtering

郭福强,简基康,郑毓峰,孙言飞,徐金宝,马灵灵
DOI: https://doi.org/10.3969/j.issn.1000-2839.2008.02.011
2008-01-01
Abstract:CdTe nanocrystalline thin films have been prepared on glass,Si and substrates by radio frequency(R.F.) magnetron sputtering technique at liquid nitrogen temperature.The crystal structure and morphology of the films were characterized by X-ray diffraction(XRD) and Filed-emission scanning electron microscope(FESEM).The XRD examinations revealed that CdTe films on glass and Si have a better crystal quality and higher preferential orientation along(111) plane than Al2O3.The average grain size is about 25 nm on glass,and Si substrates,but only 15 nm on Al2O3 substrates.FESEM observations revealed a continuous and dense morphology of CdTe/glass and CdTe/Si films.Optical properties of nanocrystalline CdTe films deposited on glass substrates for different deposited times are studied.
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