Studies of Structure,Composition and Photoelectric Properties of CdTe Thin Film Grown by Vacuum Sublimation

Xiwen Zhang,Gaorong HAN
DOI: https://doi.org/10.13922/j.cnki.cjovst.2001.03.015
2001-01-01
Abstract:Microstructure,chemical composition,film growth mechanism and photoelectric properties of CdTe films grown by vacuum sublimation were studied.Through analysis of XRD,TEM,XPS and photo/dark conductivity,the relation between substrate temperature and microstructure,composition and film oxidation was described systematically.The substrate temperature is the key parameter to decide the film quality.150 ℃ is confirmed to be the most suitable substrate temperature to obtain the film with the best photoelectric and physical properties.Furthermore,the mechanisms of film oxidation and film deposition were preliminarily discussed.
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