Abstract:The authors present a facile approach to the fabrication of nanopatterned sapphire substrates (NPSS) with concave pyramid structure by a wet etching method. The silica wet-etching mask on the sapphire substrate was prepared by using a colloidal monolayer templating strategy. NPSS with two different periods were prepared by employing 660 and 900 nm polystyrene colloidal spheres. Light emitting diode (LED) structure was epitaxially grown on the NPSS by the metal-organic chemical vapor deposition method. Both structural and optoelectronic properties of LEDs grown on flat sapphire substrate and NPSS were demonstrated and compared in detail. The calculations based on x-ray rocking curves revealed that the threading dislocation densities (TDDs) were decreased and the crystalline quality of epitaxial GaN film was improved when NPSS was used. Furthermore, the decrease in the edge TDDs was more prominent than that in the screw TDDs, which could be explained by the dislocation annihilation mechanism. The LEDs grown on 660- and 900-nm-NPSS exhibited 48% and 56% enhancement in light output power compared to that of a conventional LED on a flat sapphire substrate, arising from the nanoscale patterns in the sapphire which allowed more light to reflect from sapphire substrate onto the top direction.

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