Nanostructure analysis of graded oxidation coated glass prepared by APCVD on-line

H.L. Zhao,C. Zhou,Y.X. Cai,F.C. Zhang

DOI: https://doi.org/10.1016/j.matlet.2007.04.106

IF: 3

2008-01-01

Materials Letters

Abstract:A solar-control coated glass was prepared using chemical vapor deposition in the A0 zone of an annealing furnace of a float glass manufacturing line. The surface morphology and microstructure of the coated composite film were analyzed by scanning electron microscopy (SEM) and secondary-ion mass spectrometry (SIMS). This shows that the surface of amorphous silicon is smooth, the size of the nodules is about 100–200 nm, the surface roughness is 9.66 nm and the thickness of the layer is 70–78 nm. An oxidization gradient along the thickness of the silicon layer was observed.