Abstract:Cantilever-based atomic force microscopy (AFM) performed under ambient conditions has become an important tool to characterize new material systems as well as devices. Current instruments permit robust scanning over large areas, atomic-scale lateral resolution, and the characterization of various sample properties using multifrequency and multimodal AFM operation modes. Research of new quantum materials and devices, however, often requires low temperatures and ultrahigh vacuum (UHV) conditions and, more specifically, AFM instrumentation providing atomic resolution. For this, AFM instrumentation based on a tuning fork force sensor became increasingly popular. In comparison to microfabricated cantilevers, the more macroscopic tuning forks, however, lack sensitivity, which limits the measurement bandwidth. Moreover, multimodal and multifrequency techniques, such as those available in cantilever-based AFM carried out under ambient conditions, are challenging to implement. In this article, we describe a cantilever-based low-temperature UHV AFM setup that allows one to transfer the versatile AFM techniques developed for ambient conditions to UHV and low-temperature conditions. We demonstrate that such a cantilever-based AFM offers experimental flexibility by permitting multimodal or multifrequency operations with superior force derivative sensitivities and bandwidths. Our instrument has a sub-picometer gap stability and can simultaneously map not only vertical and lateral forces with atomic-scale resolution, but also perform rapid overview scans with the tip kept at larger tip–sample distances for robust imaging. Beilstein J. Nanotechnol. 2022, 13, 1120–1140. doi:10.3762/bjnano.13.95

Frequency Modulation Detection High Vacuum Scanning Force Microscope with a Self-Oscillating Piezoelectric Cantilever

Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method

Fast Amplitude Modulation Detector for Scanning Force Microscopy with High Q Factor.

Optical excitation of atomic force microscopy cantilever for accurate spectroscopic measurements

Microfabricated Dynamic Scanning Force Microscope Using A Three Dimensional Piezoelectric T-Shape Actuator

Optomechanical Atomic Force Microscope.

Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection

Novel Multibridge-Structured Piezoelectric Microdevice for Scanning Force Microscopy

Very high frequency probes for atomic force microscopy with silicon optomechanics

Dual-Frequency Resonance-Tracking Atomic Force Microscopy

Piezoresponse Force Microscopy Imaging and Its Correlation with Cantilever Spring Constant and Frequency

Piezoelectric Pb(Zr, Ti)O-3 micro-devices for scanning force microscopy and ultra-density data storage

A cantilever-based, ultrahigh-vacuum, low-temperature scanning probe instrument for multidimensional scanning force microscopy

3-Dimensional Piezodriven Microcantilever for Scanning Force Microscope.

Nanoscale Ferroelectric Characterization with Heterodyne Megasonic Piezoresponse Force Microscopy

3.8×3.8 mm2 compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators

In-situ Piezoresponse Force Microscopy Cantilever Mode Shape Profiling

Accurate 3D Nanoscale Electromechanical Imaging with a Metrological Atomic Force Microscope

Force Sensing with an Optomechanical Self-Oscillator

Laser Doppler vibration analysis of miniaturized piezoelectric scanning structure

A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator