Abstract:Laser cleaning has the advances of environmental friendliness, high quality and efficiency, no secondary damage, simple process, safety and reliability, easy to realize automation and low operation and maintenance costs. The application in manufacturing and remanufacturing fields such as aerospace, automobile manufacturing, shipbuilding, and electronics industry is becoming increasingly widespread. Laser cleaning exerts an integrated effect through photon pressure, thermal ablation, vibrational waves, and plasma bursts, facilitating high-quality and efficient surface cleaning of substrates. The thermal effects serve as the primary mechanism driving thermal ablation and plasma bursts, predominantly governing most cleaning scenarios. The laser's thermal effects are employed to eliminate surface contaminants, yet its residual influence may concurrently inflict damage on the substrate. How to avoid substrate damage is a challenge for the engineering of laser cleaning technology. This paper focuses on the thermal effects and minimizing damage in laser cleaning. The mechanism of contaminants removal by thermal effects and the influence of residual thermal radiation on the substrate surface are comprehensively explained. The thermal response characteristics of substrate surface are clarified for different pulse widths, scanning speeds and energy densities. Theoretical validation analysis was performed by means of simulation. The feasibility of using laser-induced breakdown spectroscopy and photoacoustic techniques for real-time monitoring of substrate damage is discussed. Studies have demonstrated that the application of diverse cleaning methods, the selection of appropriate laser parameters, and real-time monitoring of the cleaning state can achieve the dual objectives of efficient cleaning and maintaining the integrity of the substrate.

Effects of CO2 Laser and Vacuum Plasma Cleanings on Silica-Oil-and-grease Polluted Quartz Substrates

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Removal of Particle Contaminations on Sol-Gel Coated Fused Silica Surface by Laser Cleaning

Laser Damage Induced by Contamination Particles on Coated Optical Components

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Surface Evolution and Laser Damage Resistance of CO2 Laser Irradiated Area of Fused Silica

Effects of CO2 Laser Irradiation on Surface Morphology and Stress Distribution of Fused Silica

Infrared Pulsed Picosecond Laser-Induced Plasma-Assisted Ablation of Micro-textures on Quartz Surface

Experimental investigation and numerical simulation of defect elimination by CO2 laser raster scanning on fused silica

Analysis and Experimental Investigation of Laser Induced Damage of Optics

Two Localized Co2 Laser Treatment Methods for Mitigation of Uv Damage Growth in Fused Silica

Mitigation of Laser Damage Growth in Fused Silica by Using A Non-Evaporative Technique

Irradiation Effects of CO2laser Parameters on Surface Morphology of Fused Silica

A review of thermal effects and substrate damage control in laser cleaning

Effect of Polishing-Induced Subsurface Impurity Defects on Laser Damage Resistance of Fused Silica Optics and Their Removal with Hf Acid Etching

Recovery of fused silica surface damage resistance by ion beam etching

Localized Co2 Laser Treatment and Post-Heating Process to Reduce the Growth Coefficient of Fused Silica Surface Damage

Investigation of the Multimechanism Laser Cleaning Dynamics for Rough Fused Silica Surfaces with Organic Contaminants: A Computational Simulation and Atomic Analysis.

Surface Damage Mitigation of Fused Silica with CO2 Laser

Damage Behaviors of Silica Microparticles on Fused Silica Optics under 355 Nm High Fluence Laser

Influence of Secondary Treatment with CO 2 Laser Irradiation for Mitigation Site on Fused Silica Surface