Abstract:Amorphous alumina films are isotropic and have no grain boundaries, which make them have smooth surfaces, excellent properties, and wide applications in protective coatings, catalysis, and microelectronics. However, high-quality alumina films were usually prepared by vapor-phase approaches which need expensive equipment and long production time. Additionally, amorphous films are long-range disordered, which makes the study of structure–property relationships challenging. Here, a simple sol–gel method is employed to obtain high-quality amorphous Al2O3 thin films. The microstructure, morphology, and mechanical properties of amorphous Al2O3 thin films were systematically investigated. All the Al2O3 thin films heat-treated at 600–800∘C are in amorphous state with ultrasmooth surface (Ra values about 0.29–0.43 nm) and high mechanical properties (elastic modulus ∼170[Formula: see text]GPa, hardness ∼20[Formula: see text]GPa). The mechanical properties (E and H) of Al2O3 films gradually increase with the increase of heat-treating temperature. Additionally, the Al coordination of the amorphous alumina films are analyzed by solid-state NMR and correlated with the mechanical properties. The results show that in amorphous alumina, the presence of tetrahedral Al ([4]Al) and octahedral Al ([6]Al) is helpful to improve the mechanical properties, while the five-coordinated Al ([5]Al) is not conducive to improve the mechanical properties. The results demonstrate that sol–gel method is an attractive alternative to time-consuming and expensive vapor-phase approaches and are useful for scale-up to applications and research of amorphous alumina films.

The Fabrication of the Hydrous Alumina Powders by the Sol-Gel Method

Synthesis of Nano-Alumina Hydroxide Sol Using Sol-gel Method

Effect of the Way of Water Addition on the Morphology of Nano-Sized Al2O3 Powders Prepared by Sol-Gel Method

The Microstructure, Morphology, and Mechanical Properties of Sol-Gel-derived Amorphous Aluminum Oxide Films

Improved Hydrogen Generation from the Hydrolysis of Aluminum Ball Milled with Hydride

Fabrication and Characterization of Mono-Dispersed Al2O3 Powders

Hydrolysis Process and Mechanism of Magnesium Aluminate Alkoxides

OPTIMIZATION OF HEAT TREATMENT TECHNOLOGY OF NANO Al2O3 POWDERS

Effects of Alumina Sols on the Sintering of Α-Alumina Ceramics

Hydration mechanism and sintering characteristics of hydratable alumina with microsilica addition

Influence of heat treatment conditions on the size and morphology of nano gamma-Al2O3 powders

Microstructures of Nanosized Alumina Powders Synthesized by Sol-Gel Method

Fabrication and Thermal Stability of La2O3 Doped Alumina Aerogel

A Facile Temperature-Controlled "Green" Method to Prepare Multi-kinds of High-Quality Alumina Hydrates via a Ga-In-Sn-Alloyed Aluminum-Water Interface Reaction.

Effect of Aluminum Incorporation on the Reaction Process and Reaction Products of Hydrated Magnesium Silicate

Synthesis and sintering behavior of a nanocrystalline α-alumina powder

Preparation and Crystallization of Si-Al Gel

The hydrolysis process of γ-AlON powder and preparation of highly transparent ceramics with aqueous gel-casting

Morphology Transcription Process from CMC Micelles to Inorganogel and Its Effect on the Properties of Alumina Particle

Removal of hydroxyl groups and its influence on the microstructures evolution of alumina-mullite fibers fabricated by sol-gel process