MEMS-Based Carbon Nanotube and Carbon Nanofiber Copper Micro Special Electric Contact

WANG Yu-chao,DING Gui-fu,WU Hui-qing,WANG Hong,YAO Jin-yuan,YANG Chun-shen
DOI: https://doi.org/10.3969/j.issn.1005-9490.2007.05.005
2007-01-01
Abstract:To protect MEMS micro relay,this paper designed and produced a new kind of micro special electric contact.Carbon nanotube and carbon nanofiber copper composite films were processed by MEMS fabrication to achieve these micro special electric contacts.After series testing,it was found that carbon nanotube and carbon nanofiber copper composite films got excellent electric contact properties,and the arc erosion characteristic of micro special electric contact processed by MEMS fabrication was better than that of the ungraphical composite film and pure copper electric contact.
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