The Effect of Cooling on the Development of Composition Profiles in Cu–Pt Alloys under Ar+ Ion Bombardment

CF LI,A KUROKAWA,T ASAHATA,R SHIMIZU
DOI: https://doi.org/10.1002/sia.740210109
1994-01-01
Surface and Interface Analysis
Abstract:The effect of cooling on the development of the altered layer in a Cu-Pt alloy under Ar+ ion bombardment has been studied through the accurate determination of the compositional profiles in the near-surface region by sequential ISS-AES measurements and by a new method. Although the ISS-AES measurements have not revealed any noticeable difference between the composition profiles at about -150 degrees C and room temperature, a significant difference has been observed using the new method based on He+-ISS monitoring of the surface composition under bombardment of mixed (Ar+ + He+) ions, followed by abrupt switching to bombardment with only He+ ions. The measurement procedures are described in detail, and the results obtained by both the techniques are discussed.
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