Ion Enduced Adhesion Between Metals and Oxides

Cheng Guoan,Li Hengde,Liu Baixin
DOI: https://doi.org/10.1088/0256-307x/5/5/002
1988-01-01
Abstract:The enhancement of adhesion between deposited metal layers (Ti and Cu) and the oxide substrates at RT and 300°C respectively was studied by argon ion irradiation to various doses. The experimental results showed that the adhesive strength increased after a threshold dose irradiation and reached a saturation value at higher doses in all metal/oxide pairs. RBS spectra showed that chemical reaction had taken place in Ti/oxide case, while in Cu/oxide case, both RBS and XPS analysis showed that no evidence of such reaction had been induced.
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