Micropipe Observation in Sublimation 6H-Sic By Optical Microscopy

Li Jie,Zhang Anhui,He Xiukun,Cao Quanxi,Qin Tao
DOI: https://doi.org/10.3969/j.issn.1007-7820.2009.05.024
2009-01-01
Abstract:A combination of Raman,X-ray diffraction and optical microscopy is used to characterize the quality of 6H-SiC by sublimation growth and mcropipes defects of SiC.A comparison of the numbers of micropipes before and after the etching of SiC shows that the dimension of etch pits is not linearly related to that of micropipes,and the number of micropipes observed in the optical microscopy before etching approximates that of mciropipes after etching.Experiment data shows that the size of micropipes has their lower limit,which offers an indamageable testing method for the density distribution of SiC micropipes.
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