Subsurface nitrogen bonding, thermal stability, and retention of 200 eV N 2 + implanted polycrystalline diamond studied by in situ X-ray photoelectron spectroscopy
Miriam Fischer,Sayantan Maity,Mohan Kumar Kuntumalla,Gilad Gani,Alon Hoffman
DOI: https://doi.org/10.1016/j.apsusc.2024.159740
IF: 6.7
2024-02-24
Applied Surface Science
Abstract:The properties of ultra-shallow nitrogen layers (<1 nm thick) in diamonds produced by very low energy (200 eV) N 2 + implantation in polycrystalline diamond films at different doses (1.25 × 10 14 , 3.50 × 10 14 , 7.85 × 10 14 , 1.30 × 10 15 and 9 × 10 15 ions·cm −2 ), followed by thermal annealing, are investigated by in situ X-ray photoelectron spectroscopy. Spectral analyses of C(1s) and N(1s) peaks reveal that a chemical effect occurs depending on nitrogen local concentration and annealing temperature. Nitrogen exists in a predominant CN/C-N bonding configuration, followed by minor contributions of C≡N and quaternary-N configurations. Annealing (300–1000 °C) imparts complex effects that depend on local nitrogen concentration and bonding. The onset of nitrogen thermal desorption increases with ion dose: 300 °C for 1.25 × 10 14 and 3.50 × 10 14 , 400 °C for 7.85 × 10 14 , and ∼650 °C for 1.30 × 10 15 and 9 × 10 15 ions·cm −2 . Upon annealing to 1000 °C, the remaining nitrogen concentration in the diamond subsurface region increases with ion dose. The CN/C-N configuration was more thermally stable than the C≡N, while the quaternary-N is constant with annealing temperature. The nitrogen ion retention probability increased for 1.25 × 10 14 and 3.50 × 10 14 and decreased for the higher doses due to recombination-assisted desorption. This study may have important implications for stabilizing near-surface NV - centers for quantum sensing applications.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films