Abstract:Temperature effect on positive and negative ion yields sputtered from graphite by low energy Ne+, N2+ and N+ ions was studied using a special mass-separated low energy ion beam system and secondary ion mass spectrometry (SIMS) measurements. The origin of dominant positive and negative ions was discussed according to the obtained temperature effect. It was found that C+ ion emission was enhanced by nitrogen ion bombardment compared with Ne+ bombardment and decreased to the same level as Ne+ bombardment at elevated temperature. The enhancement effect was attributed to adsorption or deposition of nitrogen to form weakly bound Cδ+–CNδ− species on the surface. No chemical enhancement effect was observed on C2− emission during nitrogen ion bombardment. The C2− yield increased with temperature during Ne+ and nitrogen ion bombardment and was assigned to originate from carbon network of graphite as a consequence of physical sputtering. During nitrogen ion bombardment, CN− ions dominated both the positive and negative ion emission. CN− ion yield during 800 eV N2+ and N+ bombardment decreased at elevated temperature, whereas during 100 eV N2+ bombardment, it increased with temperature. CN− yield as a function of kinetic energy of primary ions also exhibited difference from that of C+ and C2−. Three possible channels for CN− emission have been proposed. At higher primary energy (several hundred eV and above), physical sputtering can partly account for CN− emission. At lower primary energy (below 100 eV), it is attributed to chemical etching of surface carbon atoms by energetic nitrogen atoms and ion-induced desorption of CN species.

A SIMS study on positive and negative ions sputtered from graphite by mass-separated low energy Ne+, N2+ and N+ ions

Dynamics Of Cn- Ion Emission During Hyperthermal N-2(+) Ion Irradiation Of Graphite

Dissociative Electron Attachment to C2N2 Molecules at Surface and in Gas Phase

Dissociative thermal-electron attachment at a surface: CN− emission from nitrogen ion irradiated graphite

Synthesis and Thermal Decomposition of Carbon Nitride Films Prepared by Nitrogen Ion Implantation into Graphite

Impact of positive ion energy on carbon-surface production of negative ions in deuterium plasmas

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Hyperthermal Rare-Gas Ion-Stimulated Cn- Desorption from A Nitrogenated Graphite Surface

Effect of Microstructure of Graphite on the Nonreductive Thermal Ion Emission in Thermal Ionization Mass Spectrometry

Low-temperature chemistry induced by cosmic rays: positive and negative ions desorption from nitrile-bearing astrophysical ice analogues

Enhanced Oxygen Precipitation In Neutron-Irradiated Nitrogen-Doped Czochralski Silicon Crystal

Optical & Electronic Properties of Carbon Nitride Thin Films

Spectroscopic Study on Pulsed Laser Ablation of Graphite Target in Ecr Nitrogen Plasma for Carbon Nitride Film Deposition

Optical Emission Spectroscopy of the Nitrogen Arc in an Arc-Heated Beam Source Used for Synthesis of Carbon Nitride Films

Nanocrystalline Si Studied by Beam-Based Positron Annihilation Spectroscopy

Investigation of Carbon Nitride Films Deposited by Ion Beam-Assisted Deposition with Low Bombarding Energy of N Ions

Effect of bombarding energy of N ions on composition, hardness and surface free energy of carbon nitride films

A TDS Study of High-Temperature N 2 Adsorbed and N + Ion Implanted Nuclear Carbon Materials

Spectra Characterization of Silicon Carbonitride Thin Films by Reactive Radio Frequency Sputtering

Study On Re-Sputtering During Cnx Film Deposition Through Spectroscopic Diagnostics Of Plasma

Ion-beam-assisted Deposition of CNx Films