Principle and Design of Film Hysteresis Loop Measurement System Based on Abnormal Hall Effect

ZHOU Zhuo-zuo,YANG Xiao-fei,LI Zhen,DONG Kai-feng
DOI: https://doi.org/10.3969/j.issn.1001-3830.2011.02.011
2011-01-01
Abstract:With the improvement of technology and requirement of film manufacturing,the thickness of film is thinner and thinner,which cause the measurement of hysteresis loop using traditional methods more and more difficult.This paper discussed the theory of the abnormal Hall effect,then proposed a new measurement method,based on the theory that the abnormal Hall voltage is proportional to the magnetization of the film sample.The system used four-probe,supplied two of them a constant current on the surface of the film sample,tested the other two's voltage,then finished the hysteresis loop.The result meets the requirement of measurement with high precision and stability.
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