SIMULTANEOUS MEASUREMENTS OF THE MAGNETOSTRICTIVE COEFFICIENT,YOUNG'S MODULUS AND POISSON RATIO OF THE THIN FILM CONSIDERING THE THICKNESS OF FILM

Zheng Xiaojing,Zhou Haomiao,Zhou Youhe
2006-01-01
Acta Mechanica Solida Sinica
Abstract:Based on the classical laminated plate theory,a plate model,which determines simultaneously the magnetostrictive coefficient,Young's modulus and Poisson ratio of a thin film of a cantilever film-substrate system,is suggested. An inaccuracy for the magnetostrictive coefficient,caused by assuming the elastic properties of the film as those of the corresponding bulk material,could be avoided and only a single elastic isotropic substrate is employed in the method proposed.The model in this paper is suitable for an anisotropic substrate,and the film thickness is not required far smaller than the thickness of the substrate.So,if the properties of individual layers are known,the plate theory can also be used to determine magnetostriction strain and design multilayer MEMS(microelectromechanical systems) or bio-MEMS(bio-microelectromechanical systems) over a full range of thickness ratios.The experimental data of an Fe-based amorphous thin film were analyzed by using the model.The calculated results of the magnetostrictive coefficient on the external magnetic field was compared with the other existing models,and the discrepancy among these results were explained.At the same time,the elastic properties of the film were also obtained.
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