Development of MEMS Gas Chromatography Column

Mingjie LIAO,Li WANG,Xiaosong DU,Guangzhong XIE,Jia HU,Yadong JIANG
DOI: https://doi.org/10.3969/j.issn.1005-9490.2011.04.008
2011-01-01
Abstract:The micro gas chromatography column is one kind of analytical chemistry devices based on MEMS technology,it aims at separating components in gaseous mixture.The micro-machined gas chromatography column has several advantages compared to traditional one.In the first place,the size of the column has been significantly reduced,hence it can be adapted into portable instruments more easily;secondly,MEMS devices have lower heat capacity and lead to fast heating rate,as a result,the analyzing process is speeded up and the whole performance is meliorated.The development of microfabricated gas chromatography columns was systematically summarized with special emphasis on the column materials,configuration,structure inside the channels,relative MEMS processes and coating procedure.
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