MEMS-based gas chromatography column for the analysis of chemical warfare agent(CWA) simulates

Yi Li,Xiaosong Du,Yang Wang,Huiling Tai,Dong Qiu,Qinghao Lin,Yadong Jiang

DOI: https://doi.org/10.4028/www.scientific.net/AMM.475-476.1294

2014-01-01

Applied Mechanics and Materials

Abstract:In this report the gas chromatography column was fabricated base on micro electro mechanical system (MEMS) technology. It tries to find an equilibrium point which can fast detect CWA stimulants with efficient column separation. Under deep reactive-ion etching (DRIE) process, a 1m length, 90 um thickness and 300 urn height which form 3: 1high-aspect-ratio, MEMS-based silicon GC column was fabricated. The GC column was coated with 95%Methyl 5% Phenyl Polysilozane (DB-5) as the stationary phase. Dimethyl methyl phosphonate (DMMP), Triethyl phosphate (TEP) and Methy salicylate were used for CWA simulations. All of these three samples can be separated less than 90s with reasonable column efficiency.