A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents

Xu Yan,Hemi Qu,Ye Chang,Wei Pang,Xuexin Duan

DOI: https://doi.org/10.1063/10.0009664

2022-03-01

Nanotechnology and Precision Engineering

Abstract:The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with the currently available detection methods for CWAs. For example, gas chromatography–mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required, while commercial sensors have the disadvantages of low sensitivity and poor selectivity. Here, we develop a portable gas sensing instrument for CWA detection that consists of a MEMS-fabricated micro-preconcentrator (μPC) and a film bulk acoustic resonator (FBAR) gas sensor. The μPC is coated with a nanoporous metal–organic framework material to enrich the target, while the FBAR provides rapid detection without the need for extra carrier gas. Dimethyl methylphosphonate (DMMP), a simulant of the chemical warfare agent sarin, is used to test the performance of the instrument. Experimental results show that the μPC provides effective sample pretreatment, while the FBAR gas sensor has good sensitivity to DMMP vapor. The combination of μPC and FBAR in one instrument gives full play to their respective advantages, reducing the limit of detection of the analyte. Moreover, both the μPC and the FBAR are fabricated using a CMOS-compatible approach, and the prototype instrument is compact in size with high portability and thus has potential for application to in-field detection of CWAs.