Fast Separation on MEMS-based Multicapillary Gas Chromatographic Columns

李臆,杜晓松,高超,郭攀,程璐婳,蒋亚东

DOI: https://doi.org/10.13595/j.cnki.issn1000-0720.2014.0113

2014-01-01

Abstract:In this report,microelectromechanical system(MEMS) technique was applied to fabrication of 50-cm-long,400 μm-depth and 40 μm-wide four-capillary gas chromatographic(GC) multi-capillary columns(MCCs).The static coating as a coating method was applied.Meanwhile 95% Methyl and 5% Phenyl Polysilozane(SE-54) as stationary phase were coated on the column.In this experiment the MCC were compared with a 30m long Agilent HP-5 commercial capillary column.The N-alkane mixtures were perfectly separated on both columns.The retention time of N-alkane components was 2 times shorter than those on the capillary column.The plate number can reach 15342 plates/m.In addition,benzene,toluene and phenol which can cause cancer were separated by MCC.All components were separated within 1 min and it was three times shorter than those previously reported.