A Micro-Displacement Sensor Based on the Thick-Film Ceramic Capacitor

Qian Yujie,Gao Lisheng,Wang Huanqin,Ma Yiwu,Kong Deyi,Xiong Jianping,Wang Yingxian,Zhang Rui

DOI: https://doi.org/10.3969/j.issn.1671-4776.2011.03.009

2011-01-01

Abstract:A novel micro-displacement sensor based on the thick film ceramic capacitor was deve-loped for further study of the dynamics and kinematics states of objects in micro/nano circumstance.It was used to realize micro/nano-scaled position sensing and operation,and establish the related theories and methods to detect the displacement and stress in nano-scale.As to the sensor,the signal processing circuit was integrated with the thick-film capacitor chip by thick-film hybrid integrated technology,in other words,the thick film circuit was used instead of the printed circuit board(PCB),which effectively decreased the nonlinearity errors due to the temperature effect and parasitic capacitance.Thus,the resolution and stability of the micro-displacement sensor were improved.The tests were carried out to investigate the performances of the asprepared sensor.The results show that its resolution is better than 2 nm in the range of 0-1 000 nm and the stability of the sensor is significantly increased,which is sufficient for detecting the nano-scaled variation of displacement.Furthermore,the advantages of the integrated thick film circuit compared with the PCB were discussed in terms of material properties and optimal designs of electric circuits.