Three-dimensional micro-displacement measurement method based on capacitance-grating sensor

Xine Li,Rui Wang,Hongmian Du,Yangyang Lu

DOI: https://doi.org/10.1016/j.measurement.2021.110179

IF: 5.6

2022-01-01

Measurement

Abstract:In order to solve the problems that it's difficult in installing a sensor in a narrow space and identifying micro-displacement direction in micro-displacement measurement. A three-dimensional micro-displacement measurement method based on capacitance-grating sensor was proposed by highlighting the idea of combining several groups of capacitance grids and the theory of displacement coordinate decomposition. The sensor structure was optimized and a three-dimensional micro-displacement test system was also established. By taking into consideration the positional relationship of the sensors in measurement model, a micro-displacement measurement model of sphere eccentricity was established to deduce the relationship between the displacement in the x,y and z directions and capacitance change. The relationship between the displacement direction and the capacitance change trend was also analyzed, based on which, a three-dimensional spatial micro-displacement decoupling mathematical model was established to measure displacement and judge the specific direction. BP neural network was also used to realize the decoupling of three-dimensional spatial micro-displacement and verification of decoupling accuracy. Under the ideal simulation conditions, the decoupling errors in x,y and z directions are less than 4 μm. The experimental results show that decoupling errors are all less than 8 μm. According to the results, the three-dimensional micro-displacement measurement method based on capacitance-grating sensor could measure the three-dimensional micro-displacement and identify the direction. The accuracy could reach 1.6% over the full range of sensor.

engineering, multidisciplinary,instruments & instrumentation