Design of Capacitance Micro-Displacement Sensor and Its Application

SUN Li-ning,YAN Zu-gen
DOI: https://doi.org/10.3969/j.issn.1000-9787.2005.10.005
2005-01-01
Abstract:The principle of the robot system based on error compensation is presented.The micro-displacement capacitance sensor and its signal conditioning circuit are designed by adopting equipotential annulus technology and driving cable technology.Experimental results show that the sensor's non linearity of 0.2 % and resolution of(0.1 μm) can be achieved.The deviation of the robot system is tested and compensated using capacitance sensor,and the performance of the robot is improved.
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