Size and Profile Measurement of Micro Holes by Mold Extraction and Image Processing

Li Yong,Hu Ruiqin
2013-01-01
Nanotechnology and Precision Engineering
Abstract:A measuring method was presented that combines mold extraction and image processing to measure the internal geometry of micro holes.Adopting vinyl polysiloxane of hyperelasticity as mold material,the internal form of micro holes was copied as the external form of the mold by mold extraction method.By taking photos of the mold through microscope and utilizing image processing means,such as image segmentation,border tracing and line detection,a curve showing the variation of internal diameter of micro hole with hole depth was obtained.A measuring software was developed for the measurement of size and profile of micro holes in combination with mold extraction.The copy accuracy of the mold by mold extraction method was tested by the software,and for micro holes whose diameter varies from 145 μm to 155 μm,the average absolute error between the molds and original holes at the end was 0.9 μm.An internal mold of a three-dimensional cavity was made to obtain the average absolute error between the mold and cavity of 0.37 μm and the root mean square error of 0.51 μm.Combining mold extraction and image processing,the method can be used to measure the diameter and internal geometry of micro holes.
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