Simulation of Rolling Imprinting of Microstructure based on ABAQUS

LIU Yang,YE Huichun,LI Mujun
DOI: https://doi.org/10.3969/j.issn.1003-5311.2012.12.003
2012-01-01
Abstract:Based on the finite element method and the ABAQUS software,a 2D model of micro hot embossing process was simulated.The heat curable material PMMA wais employed in the simulation,which was modeled as an elastic perfectly-plastic material.The copying rate of the pattern,the maximum width and maximum depth of the copy pattern were taken as the evaluation criterions.Detailed analysis was made to investigate the influence of various factors,such as pattern size,pattern duty cycle,distance between roller and the polymer,scrolling speed,polymer elastic modulus to the imprinting quality and the imprint pressure.Simulation results showed that the distance between roller and the polymer,the pattern duty cycle and the polymer elastic modulus had impact on the imprinting process seriously.The influence of pattern size and scrolling speed on the embossing results can be ignored.
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