Simulation and Experimental Study on Recovery of Polymer During Hot Embossing

Peng Jin,Yulong Gao,Tingting Liu,Jiubin Tan,Zhe Wang,Haoran Zhou
DOI: https://doi.org/10.1143/jjap.48.06fh10
IF: 1.5
2009-01-01
Japanese Journal of Applied Physics
Abstract:The recovery of polymer caused by the stress in polymer has a significant effect on the imprinting accuracy in three-dimensional (3D) hot embossing lithography (HEL). A method is proposed in this paper to simulate the recovery defect of a 3D structure. The filling characteristics of polymer and the stress distribution in polymer are analyzed using a combination model of non-Newtonian fluid and linear-elastic solid. The recovery of polymer after demolding is predicted by simulating the process of stress release. The good agreement between simulation and experimental results with an error of structure depth under 4% indicates that the proposed method is effective in optimizing the process parameters, and it can therefore be used to reduce the recovery of polymer thereby improving the 3D imprinting accuracy.
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