Nanopipes in undoped AlGaN epilayers

Junyong Kang,Shin Tsunekawa,Bo Shen,Zhenhong Mai,Chaoying Wang,Toshihide Tsuru,Atsuo Kasuya
DOI: https://doi.org/10.1016/S0022-0248(01)01050-8
IF: 1.8
2001-01-01
Journal of Crystal Growth
Abstract:The surface morphologies of nanopipes were imaged using a scanning electron microscope and an atomic force microscope in undoped AlGaN epilayers grown by metal organic vapor phase epitaxy on GaN-based layers. The nanopipes usually appear as dodecagonal and hexagonal pyramidal indentations for larger and smaller sizes, respectively, with a pinhole at each of their centers. The results indicate that {112̄1} facets may play an important role as well as {101̄1} facets during the nanopipe formation in undoped AlGaN epilayers. Energy dispersive X-ray spectroscopy shows that Al atoms have precipitated more distinctly on the facets of the nanopipes. The image of yellow cathodoluminescence is characterized by a bright ring around the outer region of pyramidal indentations. This is suggested to be a result of competition between the higher concentration of the defects responsible for the yellow luminescence and the thinner epilayer in the facet site.
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