Abstract:Plasmonic nanoscale devices/structures have gained more attention from researchers due to their promising functions and/or applications. One important technical focus on this rapidly growing optical device technology is how to precisely control and fabricate nanostructures for different functions or applications (i.e., patterning end points should locate at/near the interface while fabricating these plasmonic nanostructures), which needs a systematic methodology for nanoscale machining, patterning, and fabrication when using the versatile nanoprecision tool focused ion beam (FIB), that is, the FIB-assisted interface detection for fabricating functional plasmonic nanostructures. Accordingly, in this work, the FIB-assisted interface detection was proposed and then successfully carried out using the sample-absorbed current as the detection signal, and the real-time patterning depth control for plasmonic structure fabrication was achieved via controlling machining time. Besides, quantitative models for the sample-absorbed currents and the ion beam current were also established. In addition, some nanostructures for localized surface plasmon resonance biosensing applications were developed based on the proposed interface detection methodology for FIB nanofabrication of functional plasmonic nanostructures. It was shown that the achieved methodology can be conveniently used for real-time control and precise fabrication of different functional plasmonic nanostructures with different geometries and dimensions.

Virtual gray-scale mask for fabrication of micro-optical elements via focused ion beam direct writing

Reactive ion beam etching for diffractive optical elements

Integration of Micro-Optical Elements with Top-End of Fibers Via Focused Ion Beam Direct Fabrication

Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

One-Step Maskless Microfabrication of Hybrid Microlens by Use of Focused Ion Beam Directly Milling

A Gray-Scale Mask Fabrication System For Diffractive Micro Optics

Quasi-Direct Writing Of Diffractive Structures With A Focused Ion Beam

Microfabrication Of Diffractive Optical Element With Continuous Relief By Focused Ion Beam

Microfabrication of Microlens Array by Focused Ion Beam Technology

Experimental study of microcylindrical lenses fabricated using focused-ion-beam technology

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Fabrication of Three-Dimensional Microstructures by Two-Dimensional Slice by Slice Approaching Via Focused Ion Beam Milling

Large-Area and High-Precision Milling of Focused Ion Beam Based on the Integration of Nanoscale Machine Vision and Compensation Control

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Integration of Microdiffractive Lens with Continuous Relief with Vertical-Cavity Surface-Emitting Lasers Using Focused Ion Beam Direct Milling

Fabrication of Optical Nanofibre-Based Cavities using Focussed Ion-Beam Milling -- A Review

Coding Gray-Tone Mask for Refractive Microlens Fabrication

Coding Gray-Tone Mask for Fabrication of Microoptical Elements

Direct Writing Techniques in Microfabrication Using Focused Ion Beams

Use of Two-Photon Polymerization for Continuous Gray-Level Encoding of Diffractive Optical Elements

Fabrication of Micro Optical Elements with Coding Gray-Tone Mask Designed by Error-Diffusion Method