Abstract:Plasmonic nanoscale devices/structures have gained more attention from researchers due to their promising functions and/or applications. One important technical focus on this rapidly growing optical device technology is how to precisely control and fabricate nanostructures for different functions or applications (i.e., patterning end points should locate at/near the interface while fabricating these plasmonic nanostructures), which needs a systematic methodology for nanoscale machining, patterning, and fabrication when using the versatile nanoprecision tool focused ion beam (FIB), that is, the FIB-assisted interface detection for fabricating functional plasmonic nanostructures. Accordingly, in this work, the FIB-assisted interface detection was proposed and then successfully carried out using the sample-absorbed current as the detection signal, and the real-time patterning depth control for plasmonic structure fabrication was achieved via controlling machining time. Besides, quantitative models for the sample-absorbed currents and the ion beam current were also established. In addition, some nanostructures for localized surface plasmon resonance biosensing applications were developed based on the proposed interface detection methodology for FIB nanofabrication of functional plasmonic nanostructures. It was shown that the achieved methodology can be conveniently used for real-time control and precise fabrication of different functional plasmonic nanostructures with different geometries and dimensions.

Integration of Micro-Optical Elements with Top-End of Fibers Via Focused Ion Beam Direct Fabrication

Recent Progress in Optical Micro/Nanofiber Technology

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

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Investigation of Integrated Diffractive/Refractive Microlens Microfabricated by Focused Ion Beam

One-Step Maskless Microfabrication of Hybrid Microlens by Use of Focused Ion Beam Directly Milling

Integration of Microdiffractive Lens with Continuous Relief with Vertical-Cavity Surface-Emitting Lasers Using Focused Ion Beam Direct Milling

Investigation of Single Mode Fiber Coupling Using Diffractive Optical Element with Continuous Relief Fabricated by Focused Ion Beam Technology

Microfiber and Nanofiber Optics: Principles and Applications

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Investigation of Diffractive Optical Element with Continuous Relief and Submicron Feature Size for Fiber Coupling

Microstructures Made in Optical Fiber with Femtosecond Laser

Focussed Ion Beam Machining of an In-Fibre 45° Mirror for Fibre End Sensors

Single- and multi-layer micro-scale diffractive lens fabrication for fiber imaging probes with versatile depth-of-field